Small-Scale Power Systems for Mobile Electronics and
Small-Scale Propulsion Systems
Project Title:
Microball Bearing Supported PowerMEMS
Principle Investigator(s):
Reza Ghodssi (Electrical & Computer Engineering)
Abstract:
Researchers at the MEMS Sensors and Actuators Laboratory (MSAL) have
pioneered a platform for small-scale energy devices based on microball bearing
mechanical support. Previous methods of supporting MEMS motors and pumps were
based on contact and air bearing systems. These systems suffered from excessive wear,
complex fabrication schemes and the inability to perform in harsh environments.
Microturbines developed at the University of Maryland supported on encapsulated
microball bearings (285 μm ball diameter) have demonstrated lifetimes >1,000,000
revolutions and speeds in excess of 80,000 rpm. The rotary platform has recently been
utilized to create a variable capacitance micromotor and a radial inflow micropump
designed for small-scale fuel delivery.
Current research is focused in two areas: the demonstration of a high-speed magnetic
microgenerator and exploring the fundamentals of the tribology of micro-scale rolling
contact. The microgenerator will utilize an encapsulated ball bearing support and
integrated permanent magnets to maximize the overall efficiency. The ball bearings
should enable the device to reach rotational speeds up to 100,000 rpm and the integrated
magnets will provide watt-level power output. Work is also being done to characterize
the friction and wear properties of the microball support system including the utilization
of hard ceramic coatings, vapor phase lubrication and performance testing under a wide
array of harsh environments. This study will help lay the groundwork for the utilization
of microball bearings in future small-scale energy applications.

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