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Herbert Rabin Distinguished Professor, Director, Institute for Systems Research
Electrical and Computer Engineering
A. James Clark School of Engineering
Reza Ghodssi is the Herbert Rabin Distinguished Chair in Engineering, Director of the Institute for Systems Research (ISR) and Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) and the Institute for Systems Research (ISR) at the University of Maryland (UMD). He is also affiliated with the Fischell Department of Bioengineering (BIOE), the Maryland NanoCenter, the University of Maryland Energy Research Center (UMERC), and the Materials Science and Engineering Department (MSE) at UMD.
Dr. Ghodssi's research interests are in the design and development of microfabrication technologies and processes in micro/nano/bio devices and systems for chemical and biological sensing, small- scale energy conversion and harvesting with a strong emphasis toward health monitoring applications. At the University of Wisconsin, his Ph.D. thesis was focused on development of a high aspect ratio microfabrication process for an electrostatic driven MEMS device using x-ray lithography and LIGA technology. At MIT, he developed the building-block MEMS fabrication technologies for a microturbine generator device, and also served as an Assistant Director on that project. At the University of Maryland, his research group has pioneered the development of next generation PowerMEMS devices supported on micro-ball bearing, MEMS-based gray-scale technologies and the use of novel III-V and biomaterial optical MEMS devices and systems for chemical and biological detection.
Dr. Ghodssi's research has been funded by the National Institutes of Health (NIH), Army Research Office (ARO), Department of Energy (DoE), National Science Foundation (NSF), and R.W. Deutsch Foundation. He served as a chairman of the "MEMS and NEMS Technical Group" at the American Vacuum Society (AVS) from 2002 to 2004. Dr. Ghodssi was chair of the 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2009) and the 2012 NSF Workshop on Micro, Nano, Bio Systems. He also served as the Americas Technical Program Committee chair of IEEE SENSORS 2010, 2011 and 2012. He has chaired the committee for the Denice Denton Emerging Leader ABIE Award sponsored by the Anita Borg Institute for Women and Technology (ABI) and Microsoft since 2007.
Dr. Ghodssi is a Fellow of the IEEE, a 2014-2015 University of Maryland Distinguished Scholar-Teacher, has more than 120 journal publications, and is the co-editor of the MEMS Materials and Processes Handbook published in 2011. He is an associate editor for the Journal of Microelectromechanical Systems (JMEMS) and Biomedical Microdevices (BMMD). He has obtained six U.S. patents, with another eight pending. Dr. Ghodssi received the 2001 UMD George Corcoran Award, the 2002 National Science Foundation CAREER Award, and the 2003 UMD Outstanding Systems Engineering Faculty Award. He was among 100 of the nation's outstanding engineers invited to attend the National Academy of Engineering (NAE) U.S. Frontiers of Engineering Symposium in 2007 and the National Academy of Engineering (NAE) EU-U.S. Frontiers of Engineering Symposium in 2010. Dr. Ghodssi was the co-founder of the MEMS Alliance in the greater Washington area and a member of the AVS, MRS, ASEE and AAAS societies.